Số hiệu tiêu chuẩn
prEN ISO 14644-1
Tên tiêu chuẩn
Cleanrooms and associated controlled environments - Part 1: Classification of airborne particulate cleanliness for clean rooms and clean zones (ISO/DIS 14644-1:1996)
Ngày phát hành
1996-12-00
Tiêu chuẩn tương đương
DIN EN ISO 14644-1 (1997-05), IDT * 96/126782 DC (1997-01-08), IDT * ISO/DIS 14644-1 (1996-12), IDT * OENORM EN ISO 14644-1 (1997-04-01), IDT
Từ khóa
Air pollution * Air purity * Airborne dust * Amount * Classification * Classification systems * Clean rooms * Cleanliness * Clean-room technology * Concentration * Concentration of particles * Consistency * Definitions * Determination of content * Documentation * Exterior areas * Impurities * Light scatter measurement * Mathematical calculations * Methods * Number of particles * Particle analysis * Particle size * Particle size distribution * Particles * Particulate air pollutants * Pure * Pure air * Purity test * Testing * Procedures * Processes