Số hiệu tiêu chuẩn
DIN EN ISO 14644-1
Tên tiêu chuẩn
Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness (ISO 14644-1:1999); German version EN ISO 14644-1:1999
Ngày phát hành
1999-07-00
Tiêu chuẩn tương đương
EN ISO 14644-1 (1999-05), IDT * ISO 14644-1 (1999-05), IDT * SN EN ISO 14644-1 (1999-08), IDT * TS 11605 EN ISO 14644-1 (2001-05-10), IDT
Thay thế cho
DIN EN ISO 14644-1 (1997-05)
Từ khóa
Air pollution * Air purity * Air quality * Airborne dust * Amount * Categories of purity * Classes * Classification * Classification systems * Clean rooms * Cleanliness * Clean-room technology * Concentration * Concentration of particles * Consistency * Definitions * Degree of purity * Determination of content * Documentation * Exterior areas * Impurities * Light scatter measurement * Mathematical calculations * Methods * Number of particles * Particle analysis * Particle size * Particle size distribution * Particles * Particulate air pollutants * Pure * Pure air * Purity criterion * Purity test * Testing * Procedures * Processes