ISO 14644-4

Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up

2001-04-00

Có hiệu lực

DIN EN ISO 14644-4 (2003-06), IDT * DIN EN ISO 14644-4 (1998-09), IDT * ANSI/IEST/ISO 14644-4 (2001), IDT * ABNT NBR ISO 14644-4 (2004-04-30), IDT * BS EN ISO 14644-4 (2001-07-15), IDT * GB/T 25915.4 (2010), IDT * EN ISO 14644-4 (2001-04), IDT * NF X44-104 (2001-07-01), IDT * JIS B 9919 (2004-03-20), MOD * SN EN ISO 14644-4 (2001-06), IDT * OENORM EN ISO 14644-4 (2001-09-01), IDT * PN-EN ISO 14644-4 (2006-03-13), IDT * SS-EN ISO 14644-4 (2001-05-04), IDT * UNE-EN ISO 14644-4 (2001-11-27), IDT * GOST R ISO 14644-4 (2002), IDT * UNI EN ISO 14644-4:2004 (2004-12-01), IDT * STN EN ISO 14644-4 (2001-11-01), IDT * CSN EN ISO 14644-4 (2001-12-01), IDT * DS/EN ISO 14644-4 (2001-07-05), IDT * NEN-EN-ISO 14644-4:2001 en (2001-05-01), IDT * SANS 14644-4:2003 (2003-08-04), IDT

ISO 14644-2 (2000-09) * ISO 14644-1 (1999-05)

ISO/FDIS 14644-4 (2000-12)

ISO 14644-4 (2001-04) * ISO/FDIS 14644-4 (2000-12) * ISO/DIS 14644-4 (1998-06)

Acceptance inspection * Air pollution * Air purification * Air purity * Check lists * Clean rooms * Clean-room technology * Commissioning * Consumer-supplier relations * Controlled atmospheres * Definitions * Design * Installations * Maintenance * Operation * Planning * Pollution of the air * Quality requirements * Specification (approval) * Standard climates * Testing * Training

13.040.30. Không khí vùng làm việc
13.040.35. Phòng sạch và kiểm soát môi trường

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